Micro-Raman spectroscopy applied in crystal structure analysis on the ESD failure mechanism of SiC JBS diodes

作者：Jia, Yunpeng; Lin, Zhenhua^*; Hu, Dongqing; Wu, Yu; Li, Peng; Liu, Guanghai

来源：Microelectronics Reliability, 2018, 82: 37-41.

DOI：10.1016/j.microrel.2018.01.001

• 4H-SiC
• Junction barrier Schottky (JBS) diode
• Electrostatic discharge (ESD)
• Crystal structure
• Failure site
• Micro-Raman spectroscopy

This paper propose a novel reliability analysis approach for electrostatic discharge (ESD) stress on 4H-SiC junction barrier Schottky (JBS) diodes using the technology of Micro-Raman spectroscopy. Several conventional analysis are firstly used to determine the failure site after the JBS diodes are destructed by ESD stress, including optical microscope (OM), Photoemission microscopy (PEM) and scanning electron microscopy (SEM). Then, the Micro-Raman spectroscopy is applied to analyze element identification and crystal structure of micro failure site. The analysis reveals that high electric field and high temperature concentrate in the high-voltage termination, resulting in diode burnout and changing the physical microstructure of base SiC. Furthermore, in the micro failure site, 4H-SiC with different Raman spectrum from base 4H-SiC are clearly found, and carbon escapes out from base SiC by combustion, leaving a mixture of amorphous silicon and polysilicon, which is decomposed from the base SiC on the failure surface.

• 出版日期2018-3
• 单位北京工业大学