An intelligent nano-positioning control system driven by an ultrasonic motor

作者：Fan Kuang Chao; Lai Zi Fa

来源：International Journal of Precision Engineering and Manufacturing, 2008, 9(3): 40-45.

• ultrasonic motor
• FCMAC
• LDGI
• nanopositioning

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for mu m motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland C++ Builder) program to accomplish the purpose of an intelligent nano-positioning control.

• 出版日期2008-7