A two-step deposition process for electrode fabrication of CdZnTe detectors

作者：Qin, Kaifeng; Wang, Linjun^*; Zhang, Jijun; Min, Jiahua; Huang, Jian; Liang, Xiaoyan; Tang, Ke; Xia, Yiben

来源：Vacuum, 2012, 86(7): 827-829.

DOI：10.1016/j.vacuum.2011.01.021

• CdZnTe
• Radiation detector
• Deposition process
• Two-step process
• Electrode fabrication

The method of the electrode deposition process plays a vital role in determining the contact characteristics, which is often one of the dominant factors influencing the CdZnTe detector performance. In this work, a modified deposition process named two-step process for the electrode fabrication of CdZnTe detectors, was developed. This deposition process can dramatically increase the adhesion strength and reduce the inhomogeneity of the metal/semiconductor interface, and improve the detection ability of high energy radiation such as X-rays and gamma-rays. Scanning acoustic microscopy, shear tests, current voltage test and energy spectra characteristics measurements were carried out in this work.

• 出版日期2012-2-8
• 单位上海大学