摘要

With respect to the assembly of carbon nanotube field-effect transistors, the dielectrophoresis technology was used to assemble single-walled carbon nanotubes (SWCNTs) between micro-electrodes. The dielectrophoretic force driving SWCNTs in a non-uniform electric field was analyzed theoretically. The driving electric field of dielectrophoresis was simulated by the COMSOL software. A number of experiments were carried out, with the required experimental parameters for efficient assembling of SWCNTs obtained. AFM scanning and electrical properties of SWCNTs showed that the method can achieve the effective assembly of carbon nanotube field-effect transistors, and that it is also an effective method of assembly and manufacture for other one-dimensional nanomaterials assembly of nanoelectronic devices.

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