Fast and precise large area metrology of micropattern detectors using laser distance sensors

作者：Mueller R^*; Biebel O; Hertenberger R; Loesel P; Schaile O

来源：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2016, 824: 215-217.

DOI：10.1016/j.nima.2015.11.003

• Metrology
• Laser distance sensors
• Micropattern gaseous detectors
• Planar detectors
• Semi-transparent surfaces
• Coordinate measurement machine

Novel developments in micropattern detector technology require fast and precise methods to measure large area topologies in the order of a few square meters. Standard tactile coordinate measurement systems have resolutions better 10 mu m, but suffer from relatively long measuring time of several hours for one cycle. Sensitive structures may be damaged when touched by the tactile sensor. We present a method using laser distance sensors. Such a device is able to scan surfaces fast without touching them. The presented device has the capability to measure semitransparent surfaces. The vertical translator to mount the sensor is able to move in sub-mm steps. Using this we are able to measure the position and height of copper on FR4 with an accuracy better than 10 mu m. We report on the performance of the sensor scanning non-transparent as well as semi-transparent surfaces. This includes studies to minimize the measurement time without a loss in resolution. Our method to calibrate the measurement system will also be shown. This calibration is needed to reach a resolution better than 10 mu m.

• 出版日期2016-7-11