A MEMS-Based Heating Holder for the Direct Imaging of Simultaneous In-Situ Heating and Biasing Experiments in Scanning/Transmission Electron Microscopes

作者：Mele Luigi; Konings Stan; Dona Pleun; Evertz Francis; Mitterbauer Christoph; Faber Pybe; Schampers Ruud; Jinschek Joerg R

来源：Microscopy Research and Technique, 2016, 79(4): 239-250.

DOI：10.1002/jemt.22623

<jats:title>ABSTRACT</jats:title><jats:p>The introduction of scanning/transmission electron microscopes (S/TEM) with sub‐Angstrom resolution as well as fast and sensitive detection solutions support direct observation of dynamic phenomena <jats:italic>in‐situ</jats:italic> at the atomic scale. Thereby, <jats:italic>in‐situ</jats:italic> specimen holders play a crucial role: accurate control of the applied <jats:italic>in‐situ</jats:italic> stimulus on the nanostructure combined with the overall system stability to assure atomic resolution are paramount for a successful <jats:italic>in‐situ</jats:italic> S/TEM experiment. For those reasons, MEMS‐based TEM sample holders are becoming one of the preferred choices, also enabling a high precision in measurements of the <jats:italic>in‐situ</jats:italic> parameter for more reproducible data.</jats:p><jats:p>A newly developed MEMS‐based microheater is presented in combination with the new NanoEx™‐i/v TEM sample holder. The concept is built on a four‐point probe temperature measurement approach allowing active, accurate local temperature control as well as calorimetry. In this paper, it is shown that it provides high temperature stability up to 1,300°C with a peak temperature of 1,500°C (also working accurately in gaseous environments), high temperature measurement accuracy (&lt;4%) and uniform temperature distribution over the heated specimen area (&lt;1%), enabling not only <jats:italic>in‐situ</jats:italic> S/TEM imaging experiments, but also elemental mapping at elevated temperatures using energy‐dispersive X‐ray spectroscopy (EDS). Moreover, it has the unique capability to enable simultaneous heating and biasing experiments. <jats:italic>Microsc. Res. Tech. 79:239–250, 2016</jats:italic>.

• 出版日期2016-4