Deposition of iron sulfide thin films by AACVD from single source precursors

作者：Akhtar Masood; Abdelhady Ahmed Lutfi; Malik M Azad; O'Brien Paul^*

来源：Journal of Crystal Growth, 2012, 346(1): 106-112.

DOI：10.1016/j.jcrysgro.2012.02.013

• Crystallites
• Substrates
• Aerosol assisted chemical vapor deposition (AACVD)
• Cubic pyrite
• Hexagonal pyrrhotite
• tris(dialkyldithiocarbamato)iron(III)

The unsymmetrical [Fe((S2CNEtPr)-Pr-i)(3)] (1), [Fe(S2CNEtMe)(3)] (2) and symmetrical [Fe(S2CN(Hex)(2))(3)] (3), Fe(S2CN(Et)(2))(3)] (4) tris(dialkyldithiocarbamato)iron(III) complexes were used as single source precursors for the deposition of iron sulfide thin films by the aerosol assisted chemical vapor Deposition (AACVD) method. The unsymmetrical complexes deposited the mixed phases (pyrite and marcasite) at all deposition temperatures except the complex (2) which deposited pyrite and pyrrhotite at 400 degrees C. The symmetrical complex (3) with longer alkyl groups produced a mixture of pyrite and pyrrhotite phases at 350 and 450 degrees C but pyrite and mackinawite at 400 degrees C whereas the complex (4) with shorter alkyl groups deposited a mixture of pyrite and marcasite at 350 degrees C but a pure pyrrhotite phase at 400 and 450 degrees C.

• 出版日期2012-5-1