Superhard nanocomposite nc-TiC/a-C : H film fabricated by filtered cathodic vacuum arc technique

作者：Wang Yaohui; Zhang Xu; Wu Xianying; Zhang Huixing; Zhang Xiaoji

来源：Applied Surface Science, 2008, 254(16): 5085-5088.

DOI：10.1016/j.apsusc.2008.02.011

• nanocomposite nc-TiC/a-C : H film
• superhardness
• microstructure

Superhard nanocomposite nc-TiC/a-C:H films, with an excellent combination of high elastic recovery, low friction coefficient and good H/E ratio, were prepared by filtered cathodic vacuum arc technique using the C(2)H(2) gas as the precursor. The effect of C(2)H(2) flow rate on the microstructure, phase composition, mechanical and tribological properties of nanocomposite nc-TiC/a-C:H films have been investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), energy disperse spectroscopy (EDS), microindentation and tribotester measurements. It was observed that the C(2)H(2) flow rate significantly affected the Ti content and hardness of films. Furthermore, by selecting the proper value for C(2)H(2) flow rate, 20 sccm, one can deposit the nanocomposite film nc-TiC/a-C:H with excellent properties such as superhardness (66.4 GPa), high elastic recovery (83.3%) and high H/E ratio (0.13).

• 出版日期2008-6-15
• 单位北京市辐射中心; 北京师范大学