摘要
A novel power generator has been achieved to convert vibration to electrical energy via the piezoelectric effect. The generator obtained by micro fabrication process mainly consists of silicon based Frame and composite cantilever. The prototype tested at resonant vibration generates 1.15 mu W of effective power to a 20.4-k Omega resistance load. The potential of this work is to offer miniaturization solutions for power generators, and with the proposed method the ambient ubiquitous vibration can be harvested effectively as endless energy source to form an integrated self-powering system.
- 出版日期2006-3
- 单位上海交通大学