Aluminum nitride nanophotonic circuits operating at ultraviolet wavelengths

作者：Stegmaier M; Ebert J; Meckbach J M; Ilin K; Siegel M; Pernice W H P^*

来源：Applied Physics Letters, 2014, 104(9): 091108.

DOI：10.1063/1.4867529

Aluminum nitride (AlN) has recently emerged as a promising material for integrated photonics due to a large bandgap and attractive optical properties. Exploiting the wideband transparency, we demonstrate waveguiding in AlN-on-Insulator circuits from near-infrared to ultraviolet wavelengths using nanophotonic components with dimensions down to 40 nm. By measuring the propagation loss over a wide spectral range, we conclude that both scattering and absorption of AlN-intrinsic defects contribute to strong attenuation at short wavelengths, thus providing guidelines for future improvements in thin-film deposition and circuit fabrication.

• 出版日期2014-3-3