科研之友
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摘要
The atomic force microscope (AFM) is a powerful tool for measuring surface roughness on the nanometre scale. This paper numerically analyses the factors affecting roughness evaluation of the surface measured by AFM. Parameters of both tip and sample are considered such as tip radius, surface autocorrelation length, standard deviation of original rough surface and its height distribution. The rough surface is generated using a 2D digital filter and the Fourier analysis method with controlled autocorrelation function and height distribution. The AFM image is simulated by mathematical morphology. For a given tip radius, a surface with high standard deviation and low correlation length causes a large error in determining roughness by AFM. We also show that the effect of tip radius on roughness exhibits two different trends depending on the surface skewness. For a normally distributed surface with near zero skewness and a rough surface with negative skewness, the root mean square (RMS) roughness decreases monotonically as tip radius increases. For a surface with large positive skewness, the RMS roughness tends to increase initially and then decrease with increasing tip radius.
- 出版日期2004-10
- 单位中国科学技术大学
