Actuation of resonant MEMS using short pulsed forces

作者：Colinet E^*; Juillard J; Guessab S; Kielbasa R

来源：Sensors and Actuators A: Physical , 2004, 115(1): 118-125.

DOI：10.1016/j.sna.2004.04.004

• resonant MEMS
• actuation principle
• electrostatic actuation
• non-linear systems

We describe a method for exciting a micro-mechanical resonator using short pulsed forces. A brief impulse excites the system whenever it passes its position of equilibrium, thus bringing it to oscillate. This actuation strategy is described from a theoretical point of view and a possible application to the case of a resonant accelerometer is presented. Results of the simulation of the entire process, obtained with VHDL-AMS, are given and commented. This actuation scheme offers several advantages: it can be applied to several sorts of excitation techniques; it reduces possible non-linearity problems; such as those associated with electrostatic actuation; it does not require any special design of the oscillating microstructure (as opposed to linear comb-drives solutions). Additionally, the electronic circuitry needed to realize the system is simple and is therefore a good alternative to other techniques for driving MEMS at resonance.

• 出版日期2004-9-15