A three-dimensional investigation of the effects of excitation frequency and sheath gas mixing in an atmospheric-pressure inductively coupled plasma system

作者：Colombo V^*; Ghedini E; Sanibondi P

来源：Journal of Physics D: Applied Physics , 2010, 43(10): 105202.

DOI：10.1088/0022-3727/43/10/105202

A three-dimensional numerical model for the simulation of the behaviour of a commercial inductively coupled plasma torch with non-axisymmetric reaction chamber has been developed, taking into account turbulence and gas mixing through RNG k-epsilon theory and the combined diffusion approach of Murphy, respectively.
The effects of changing coil current frequency, the hydrogen mixing in an argon primary gas and the flow patterns and temperature distributions which take place in a reaction chamber with a lateral gas outlet system and two observation windows have been investigated, with the final aim of setting up a computational tool able to predict the main features of plasma assisted treating and processing of injected raw materials.
Three-dimensional shapes of the temperature, velocity and mass fraction fields have been obtained and analysed for an Ar-H(2) mixture at atmospheric pressure. Computations have been performed with two different coil current frequencies, i.e. 3 and 13.56 MHz, showing that for the lower value the 3D effects in the discharge are enhanced.
Accurate mixing and demixing mechanisms have been investigated in both cases, including considerations on the relative importance of different thermal diffusion contributions due to mole fraction and temperature gradients.
Temperature distributions in the reaction chamber for different cases have been correlated with different flow patterns and recirculation flows which take place as a consequence of the non-axisymmetry of the reaction chamber.

• 出版日期2010-3-17