Mechanical properties, deformation behaviors and interface adhesion of (AlCrTaTiZr)N-x multi-component coatings

作者：Chang Shou Yi^*; Lin Shao Yi; Huang Yi Chung; Wu Chia Liang

来源：Surface and Coatings Technology, 2010, 204(20): 3307-3314.

DOI：10.1016/j.surfcoat.2010.03.041

• Hard coatings
• Nanoindentation
• Deformation
• Interface adhesion

In this study, (AlCrTaTiZr)N-x multi-component coatings with quinary metallic elements were developed as protective hard coatings for tribological application. The mechanical properties, creep behaviors, deformation mechanisms and interface adhesion of the (AlCrTaTiZr)N-x coatings with different N contents were characterized. With increasing the N-2-to-total (N-2 + Ar) flow ratio, R-N, during sputtering deposition, the (AlCrTaTiZr)Nx coatings transformed from an amorphous metallic phase to a nanocomposite and finally a crystalline nitride structure. The hardness of the coatings accordingly increased from 13 GPa to a high value of about 30 GPa, but the creep strain rate also increased from 1.3 x 10(-4) to 7.3 x 10(-4) 1/s. The plastic deformation of the amorphous metallic coating deposited with R-N = 0% proceeded through the formation and extension of shear bands, whereas dislocation activities dominated the deformation behavior of the crystalline nitride coatings deposited with R-N = 10% and 30%. With increasing R-N, the interface adhesion energy between the coatings and the substrates was also enhanced from 6.1 to 22.9 J/m(2).

• 出版日期2010-7-15