A Self-Mixing Displacement Sensor With Fringe-Loss Compensation for Harmonic Vibrations

作者：Zabit Usman^*; Bony Francis; Bosch Thierry; Rakic Aleksandar D

来源：IEEE Photonics Technology Letters, 2010, 22(6): 410-412.

DOI：10.1109/LPT.2010.2040825

• Displacement measurement
• optical feedback
• optical interferometry
• vibration measurement

The disappearance of self-mixing fringes in the moderate feedback regime decreases the displacement measurement accuracy. The proposed method detects and compensates the fringe-loss, to limit the error to around 40 nm for micrometer range harmonic amplitude displacements. Moreover, it can also treat arbitrary displacements without any time-consuming optimization procedure and is suitable for implementation in a real-time displacement sensor.

• 出版日期2010-3-15