Low-power resonant laser ablation of copper

作者：Gill CG^*; Allen TM; Anderson JE; Taylor TN; Kelly PB; Nogar NS

来源：Applied Optics, 1996, 35(12): 2069-2082.

DOI：10.1364/AO.35.002069

We emphasize two points: (1) the properties and mechanisms of very low-fluence ablation of copper surfaces and (2) the sensitivity and selectivity of resonant laser ablation (RLA). We present results for ablation of bulk copper and copper thin films; spot-size effects; the effects of surface-sample preparation and beam polarization; and an accurate measurement of material removal rates, typically less than or equal to 10(-3) Angstrom at 35 mJ/cm(2). Velocity distributions were Maxwellian, with peak velocities approximate to 1-2 x 10(5) cm/s. In addition, we discuss the production of diffractionlike surface features, and the probable participation of nonthermal desorption mechanisms. RLA is shown to be a sensitive and useful diagnostic for studies of low-fluence laser-material interactions.

• 出版日期1996-4-20