Nanocomposite glass abrasives

作者：Suda Seiichi^*

来源：Journal of the Ceramic Society of Japan, 2014, 122(1424): 244-249.

DOI：10.2109/jcersj2.122.244

• Spray pyrolysis
• Glass abrasives
• Nano-composite particles
• Chemical mechanical polishing
• Cerium oxide
• Perovskites

Cerium oxide is a suitable material for glass polishing because it has both a high chemical reactivity and a suitable hardness for glass polishing. We focused on nano-dispersion abrasives containing two materials that specialize in a chemical reactivity with glass and a suitable mechanical strength and they were synthesized by spray pyrolysis. We first review on CeO2-ZrO2-Y2O3 nano-composite abrasives that can show you the effect of nano-composition on glass polishing. These nano-composites showed slightly lower removal rate than commercial CeO2-based abrasive, but the composite led to smooth surface of glass. The nano-dispersed SrZrO3/ZrO2 composite particles were then synthesized by spray pyrolysis. The glass polishing using SrZrO3/ZrO2 nanocomposite abrasives led to relatively high removal rate and quite smooth surface of glass. The SrZrO3/CeO2 abrasives showed superior polishing properties to conventional ceria-based abrasives by adjusting SrZrO3/CeO2 ratios. These results revealed that the nano-composition enables us to control mechanical and chemical ratios and this CMP control would lead to develop leading-edge abrasives.

• 出版日期2014-4