Nano electron source fabricated by beam-induced deposition and its unique feature

作者：Murakami Katsuhisa^*; Takai Mikio

来源：Microelectronic Engineering, 2015, 132: 74-82.

DOI：10.1016/j.mee.2014.10.004

• Electron beam induced deposition
• Focused ion beam induced deposition
• Vacuum nanoelectronics
• Field emission

The fabrication of nanoscale field emitters with gate structures using beam-induced deposition and their field emission properties are described. Nano electron sources can be fabricated by electron-beam-induced deposition without additional processes. The inherent issues of process contamination and the effectiveness of post cleaning using annealing or radical oxygen gas exposure to remove contaminants introduced during beam deposition are also discussed. In addition, coherent electron beams for electron wave interference emitted from a beam-deposited Pt field emitter were investigated by field emission microscopy and field ion microscopy. The interference fringe patterns observed for beam-deposited Pt field emitters were attributed to electron wave interference occurring at two adjacent emission sites on a single Pt nanocrystal.

• 出版日期2015-1-25