Micro-cavities in silicon-on-insulator photonic crystal slabs: Determining resonant frequencies and quality factors accurately

作者：Qiu M^*

来源：Microwave and Optical Technology Letters, 2005, 45(5): 381-385.

DOI：10.1002/mop.20830

• micro-cavity
• photonic crystal slabs
• silicon-on-insulator

Micro-cavities in two-dimensional silicon-on-insulator (SOI) photonic-crystal slabs are studied. A combination of the finite-difference time-domain (FDTD) technique and the Pad approximation with Baker's algorithm is used to accurately compute the resonant-frequencies and quality,factors simultaneously. The simulations show that, for similar cavity structures, the mode quality factors of cavities in SOI-type photonic-crystal slabs are much smaller than those in membrane photonic-crystal slabs, and deep etching of air holes is still required to obtain relatively higher Omega.

• 出版日期2005-6-5