A signal interpolation method for Fabry-Perot interferometer utilized in mechanical vibration measurement

作者：Shyu Lih Horng; Wang Yung Cheng; Chang Chung Ping; Shih Hung Ta^*; Manske Eberhard

来源：Measurement, 2016, 92: 83-88.

DOI：10.1016/j.measurement.2016.05.072

• Fabry-Perot interferometer
• Interpolation model
• Lookup table (LUT) method
• Fitted method
• Frequency spectrum

In this investigation, a self-developed signal processing method for Fabry-Perot interferometer is proposed which can be utilized for high-speed dynamic displacement measurements, e.g. mechanical vibration measurements. The lookup table (LUT) integrated with the interference intensity equation has been employed for the interpolation processing of interference signals. With the aid of this method, the interpolation error has been reduced by 40% in comparison with that resulting from the commercial sinusoidal signal processing module. By operations of Fast Fourier Transform (FFT), the displacement measurement distribution can be converted into the frequency spectrum diagram. The interpolation resolution of the proposed interferometric displacement measurement system is about 0.1 nm. Experimental results demonstrate that this interferometer system is available for measuring frequencies till 2 kHz where its corresponding amplitude is 0.15 mu m.

• 出版日期2016-10