A passive reaction force compensation (RFC) mechanism for a linear motor motion stage

作者：You Yo han; Ahn Hyeong Joon^*

来源：International Journal of Precision Engineering and Manufacturing, 2014, 15(5): 797-801.

DOI：10.1007/s12541-014-0402-1

• Reaction force compensation
• Eddy current damper
• Linear motion stage

Vibration of the system base due to reaction force of rapid acceleration or deceleration motion of a stage is one of main causes for reducing life and productivity of the manufacturing equipment. This paper presents a passive RFC (reaction force compensation) mechanism for a linear motor motion stage. A systematic design process of the RFC system is developed based on a simple mathematical model of the RFC system. In addition, two ways are introduced to reduce the resonance vibration of the magnet track. Finally, a XY linear motion stage with the RFC mechanism is built, and the performance of the system is verified experimentally: In case of acceleration and deceleration of 10 m/s(2), around 60% of residual vibration of the system base is reduced with the RFC mechanism.

• 出版日期2014-5