Analysis of a Monolithic, Nonperiodic Array of Quartz Crystal Microbalances

作者:Liu Nan*; Yang Jiashi; Wang Ji; Kosinski John A
来源:Japanese Journal of Applied Physics, 2013, 52(7): 077301.
DOI:10.7567/JJAP.52.077301

摘要

We study thickness-shear and thickness-twist vibrations of a crystal plate with a nonperiodic array of surface mass layers for mass sensor applications. A theoretical analysis is performed. The equations of anisotropic elasticity are used. An analytical solution is obtained for the free vibration eigenvalue problem using trigonometric series from which the resonant frequencies and mode shapes are calculated. Results show that, depending on the geometric and physical parameters of the mass layers, the vibration may be mainly trapped under some of the mass layers but not under others.