摘要

We analyzed carrier trapping in AlGaN/GaN HEMT occurring between gate and drain with a bias-controllable Field Plate (CFP) on a Si3N4 passivation, which is structurally and electrically independent from other electrodes. We observed the recovery of a transient drain current which was associated with carrier emission after the momentary pulse bias of CFP. From the temperature dependence of pulsed I-V measurements, an activation energy of the trap state was 0.083eV and capture cross section was 2.0x10(-24)cm(-2). This value is the same to the activation energy of the surface leakage current in AlGaN/GaN HEMT with Si3N4 passivation. The trap state with the activation energy of 0.083eV has important role in pulse operation of AlGaN/GaN FP-HEMT with Si3N4 passivation.

  • 出版日期2017-8