DEVELOPMENT AND FABRICATION OF TiO2 TIP ARRAYS FOR GAS SENSING

作者：Hotovy Ivan^*; Kostic Ivan; Hascik Stefan; Rehacek Vlastimil; Liday Jozef; Sitter Helmut

来源：Journal of Electrical Engineering, 2011, 62(6): 363-366.

DOI：10.2478/v10187-011-0058-3

• TiO2 thin films
• dc magnetron sputtering
• reactive ion etching
• electron beam lithography
• tip array

Titanium oxide thin films were deposited at room temperature by reactive magnetron sputtering in a mixture of oxygen and argon on oxidized silicon substrates. The optimal etching characteristics of TiO2 films by reactive ion etching (RIE) and RIE with inductively coupled plasma source (ICP) were investigated. Patterning of TiO2 tip arrays by electron beam lithography and dry etching were developed. Different spot sizes 200 and 500 rim in diameter and with spacing 500 and 1000 nm were investigated with regards to the minimal size and the pyramidal shape. Experimental results have shown that the exposure dose optimization wa a significant parameter for controlling the tip size and its shape. We successfully fabricated the pyramidal TiO2 tip arrays over an 1 x 1 mm(2) area. The TiO2 tip array can be expected to have an important application in gas microsensors.

• 出版日期2011-12
• 单位中国科学院电工研究所