Microstructures and properties of diamond-like carbon/TiAlN composite films by MF magnetron sputtering

作者：Zhang Yichen^*; Ba Dechun; Yu Dayang; Ma Shengge

来源：Chinese Journal of Vacuum Science and Technology, 2008, 28(5): 424-428.

• DLC films
• Medium frequency sputtering
• Plasma ion assisted deposition
• TiAlN films
• Unbalanced magnetron sputtering

The diamond-like carbon(DLC)/TiAlN composite films, with gradient transition layers, were grown by mid frequency magnetron sputtering and Hall ion source assisted deposition on high speed steel W18Cr4V and silicon substrates. Its microstructures and its mechanical properties were characterized with scanning electron microscopy (SEM). X-ray photoelectron spectroscopy (XPS) and conventional mechanical probes. The results show that the fairly smooth and compact DLC/TiAlN films, about 1 μm in thickness with strong interfacial adhesions, display good mechanical properties. For example, its micro-hardness is 2030 HV, close to that of the DLC films, but higher than that of TiAIN films on high speed steel substrate. When it comes to wear resistance, the DLC/TiAlN composite film is a little better than both DLC and TiAIN films. Moreover, it has higher corrosion resistance than the DLC films. The ID/IG was found to be 2.63. The XPS depth profiles show that the DLC/TiAlN surface structure resembles that of DLC and its inner layers mimics that of TiAlN films. Interesting finding is that high content of Al possibly roughens the surfaces of DLC/TiAlN films.

• 出版日期2008
• 单位东北大学