Fast-response ozone sensor with ZnO nanorods grown by chemical vapor deposition

作者：Chien Forest Shih Sen^*; Wang Chang Ren; Chan Yu Lin; Lin Hsiao Lan; Chen Min Hung; Wu Ren Jang

来源：Sensors and Actuators B: Chemical , 2010, 144(1): 120-125.

DOI：10.1016/j.snb.2009.10.043

• Ozone sensor
• ZnO
• Chemical vapor deposition (CVD)
• Nanorod

Nanostructures of ZnO grown by chemical vapor deposition were used as sensing materials. These materials, ZnO nanorods, were characterized by scanning electron microscopy (SEM), photoluminescence (PL) and X-ray diffraction (XRD). The ozone sensing Properties of various ZnO nanomaterials were studied. Under 2.5 ppm ozone, ZnO nanorods showed a rapid response time of 45 s and recovery time of 5 s, and the sensor response (S, the ratio of the resistance in an ozone gas without UV to resistance in air with UV, S = R(ozone)/R(air)) is 850. The low defect density and high mobility accounts for the fast response and recovery times. The sensor response was measured in the range from I to 2.5 ppm ozone in this Study.

• 出版日期2010-1-29