摘要
The potential of hexyl acrylate as an initiator in photo-initiated (pi) CVD is explored by demonstrating its auto-polymerization under ultraviolet (UV) radiation of wavelength 254 nm. Deposition of poly(hexyl acrylate) films on silicon substrates proceeds at high rates, approaching 1.7 mu m min(-1), at a stage temperature of 12.1 degrees C, and the process is observed to be adsorption controlled.
- 出版日期2014-3
- 单位上海交通大学