Potential of Hexyl Acrylate Monomer as an Initiator in Photo-initiated CVD

作者:Tang Bo*; Hu Guoxin
来源:Chemical Vapor Deposition, 2014, 20(1-3): 14-22.
DOI:10.1002/cvde.201304322

摘要

The potential of hexyl acrylate as an initiator in photo-initiated (pi) CVD is explored by demonstrating its auto-polymerization under ultraviolet (UV) radiation of wavelength 254 nm. Deposition of poly(hexyl acrylate) films on silicon substrates proceeds at high rates, approaching 1.7 mu m min(-1), at a stage temperature of 12.1 degrees C, and the process is observed to be adsorption controlled.