Dependence of the Optical Anisotropy of ZnO Thin Films on the Structural Properties

作者：Kang Man Il^*; Kim Sok Won; Kim Yong Gi; Ryu Ji Wook

来源：Journal of the Korean Physical Society, 2010, 57(2): 389-394.

DOI：10.3938/jkps.57.389

• ZnO
• Optical anisotropy
• Spectroscopic ellipsometry

The structural properties and optical anisotropy of strained ZnO films prepared by rf magnetron sputtering were investigated. Anisotropic complex refractive index spectra of the films were determined by using the Adachi-New Forouhi dispersion model with phase-modulated spectroscopic ellipsometry in the range of 1.0 similar to 4.0 eV. A negative strain was induced by the mismatch between the ZnO film and the Al(2)O(3) substrate and decreased with improving crystallinity of the film. The size of the grains formed in the films showed a linear dependence on the strain. The optical anisotropy of the ZnO films was enhanced with improving crystallinity of the films. A shifting of the critical points of the anisotropic complex refractive index spectra was observed due to variations in the strain. The anisotropic complex refractive index spectra showed a strong dependence on structural changes in the ZnO films.

• 出版日期2010-8