科研之友
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摘要
A method for transparent polymer (polydimethylosiloxane, PDMS) to glass-covered low-temperature co-fired ceramics (LTCC) using microwave argon plasma is reported in this paper. Changes in the composition of both materials before and after plasma treatment are investigated with x-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy-attenuated total reflection and contact angle measurements. The results obtained for PDMS and glass-covered LTCC modified with argon plasma are compared with previously reported results received for oxygen plasma. Moreover, a comparison of adhesion between PDMS and glass-covered LTCC bonded together using Ar and O-2 plasma is made using a material testing machine.
- 出版日期2010-11
