Fabrication of Feedhorn-Coupled Transition Edge Sensor Arrays for Measurement of the Cosmic Microwave Background Polarization

作者：Denis K L^*; Ali A; Appel J; Bennett C L; Chang M P; Chuss D T; Colazo F A; Costen N; Essinger Hileman T; Hu R; Marriage T; Rostem K; U Yen K; Wollack E J

来源：Journal of Low Temperature Physics, 2016, 184(3-4): 668-673.

DOI：10.1007/s10909-015-1366-y

• TES
• CMB
• Wafer bonding
• Micro-machining
• Polarization

Characterization of the minute cosmic microwave background polarization signature requires multi-frequency, high-throughput precision instrument systems. We have previously described the detector fabrication of a 40 GHz focal plane and now describe the fabrication of detector modules for measurement of the CMB at 90 GHz. The 90 GHz detectors are a scaled version of the 40 GHz architecture where, due to smaller size detectors, we have implemented a modular (wafer level) rather than the chip-level architecture. The new fabrication process utilizes the same design rules with the added challenge of increased wiring density to the 74 TES's as well as a new wafer level hybridization procedure. The hexagonally shaped modules are tile-able, and as such can be used to form the large focal planes required for a space-based CMB polarimeter. The detectors described here will be deployed in two focal planes with seven modules each in the Johns Hopkins University led ground-based Cosmology Large Angular Scale Surveyor (CLASS) telescope.

• 出版日期2016-8