Measurement of charge carrier's transportation in a large size self-standing CVD single crystal diamond film fabricated using lift-off method

作者：Fujita F^*; Kakimoto A; Kaneko J H; Tsubouchi N; Mokuno Y; Chayahara A; Sato K; Konno Y; Homma A; Shikata S; Furusaka M

来源：Diamond and Related Materials, 2010, 19(2-3): 162-165.

DOI：10.1016/j.diamond.2009.08.002

• CVD diamond films
• Lift-off method
• Carrier drift
• UV pulsed laser
• Time-of-flight

Using lift-off method, we synthesized large self-standing plasma CVD diamond films on various substrates. Charge carrier transportation in diamond was measured using alpha particle measurements and TOF methods with a short-pulsed UV laser. The high-quality films were synthesized rapidly. We observed the maximum transit time of holes and electrons shorter than 5 ns. The lift-off method is useful to fabricate the high-quality diamond with excellent drift velocities of the charge carrier. The charge transport characteristics of our diamond films are comparable to those of a commercially available (Element Six Ltd.) electronics grade Ila diamond single crystal.

• 出版日期2010-3