A novel ceramic chamber prototype

作者:Wu Ling Hui*; Hsu Shen Nung; Lin Chia Jui; Lee Tsung Yu; Chan Che Kai; Perng Shen Yaw; Hsiung Gao Yu; Chen June Rong
来源:Vacuum, 2015, 121: 250-254.
DOI:10.1016/j.vacuum.2014.12.031

摘要

A novel ceramic chamber prototype has been designed and fabricated which is described in this paper. The manufacture procedure of the ceramic test chamber is original. For the novel ceramic chamber, the uniformity of its inner deposited Ti film is improved to have a thickness variation of approximately 1%, and the average wall thickness error of the chamber (length 650 mm) is developed to be less than 55 mu m. The manufacture procedure is explained below. The two halves of ceramic chambers were first cleaned, the metal films were then deposited on the inner surface by sputtering and, finally, the two halves were joined with a fixture to become a ceramic tube using glass powder colloid at similar to 250 degrees C. The glass powder colloid can be used for the vacuum-assembled parts because the outgassing rate is measured to be 4.8 x 10(-9) Pa m s(-1) baking. For a novel ceramic chamber prototype, the ceramic tube was connected to the stainless steel flange by glass powder colloid and tungsten inert gas (TIG) welding. The ceramic chamber prototype was leak tight after the rapid temperature cycle test. Thus, it is feasible to fabricate the novel ceramic chamber prototype.

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