科研之友
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摘要
High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 mu m, as well as angular and wavelength -3 dB tolerances of 4 and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.
- 出版日期2008-1-7
