Analysis of the Plasma Properties Affected by Magnetic Confinement with Special Emphasis on Helicon Discharges

作者：Cheng Yuguo^*; Cheng Mousen; Wang Moge; Yang Xiong; Li Xiaokang

来源：Plasma Science and Technology, 2014, 16(12): 1111-1118.

DOI：10.1088/1009-0630/16/12/06

• helicon discharges
• magnetic confinement
• plasma property
• numerical simulation

A one-dimensional radial non-uniform fluid model is employed to study plasma behaviors with special emphasis laid on helicon discharges. The plasma density n(e), electron temperature T-e, electron azimuthal and radial drift velocities are investigated in terms of the plasma radius r(p), magnetic field intensity B-0 and gas pressure P-0, by assuming radial ambipolar diffusion and negligible ion cyclotron movement. The results show that the magnetic confinement plays an important role in the discharge equilibrium, especially at low pressure, which significantly reduces T-e, compared with the case of a negligible magnetic field effect, and higher B-0 leads to a greater average plasma density. T-e shows little variations in the plasma density range of 10(11) cm(-3)-10(13) cm(-3) for p(0) < 3.0 mTorr. Comparison of the simulation results with experiments suggests that the model can make reasonable predictions of T-e in low pressure helicon discharges.

• 出版日期2014-12
• 单位中国人民解放军国防科学技术大学