Hydrodynamic simulation of silicon ablation by ultrashort laser irradiation

作者：Ding, P. J.; Liu, Q. C.; Lu, X.; Liu, X. L.; Sun, S. H.; Liu, Z. Y.; Hu, B. T.; Li, Y. H.^*

来源：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , 2012, 286: 40-44.

DOI：10.1016/j.nimb.2011.12.027

• Hydrodynamic simulation
• Laser silicon ablation
• Ultrashort laser

Ultrashort (10 fs-100 ps) pulse laser ablation of pure silicon in vacuum was simulated by using a modified self-consistent one-dimensional hydrodynamic code to study the fundamental ablation mechanisms. The presented results provide a guide for drilling periodic microholes or microgratings on the dense insulator surface. The simulated laser ablation threshold remains nearly constant in femto-second regime, and increases as the square root of pulse duration in picosecond regime. The ablation depth as a function of pulse duration shows four different regimes and the ablation depth reaches a minimum when the pulse duration is similar to 30 ps at various laser fluences. The influence of laser-induced plasma shielding on ablation depth was also studied.

• 出版日期2012-9-1
• 单位兰州大学