A novel wavefront reconstruction algorithm based on interpolation coefficient matrix for radial shearing interferometry

作者：Zhang, Chen; Li, Dahai^*; Li, Mengyang; Kewei, E.

来源：Optics and Lasers in Engineering, 2017, 97: 86-92.

DOI：10.1016/j.optlaseng.2017.05.005

• Metrology
• Interferometry
• Phase measurement

A novel wavefront reconstruction algorithm for radial shearing interferometer (RSI) is proposed in this paper. Based on the shearing relationship of RSI, an interpolation coefficient matrix is established by the radial shearing ratio and the number of discrete points of test wavefront. Accordingly, the expanded wavefront is characterized by the interpolation coefficient matrix and the test wavefront. Consequently the test wavefront can be calculated from the phase difference wavefront. The numerical simulation is conducted to confirm the correctness of the proposed algorithm. Compared with the previous wavefront reconstruction methods, the proposed algorithm is more accurate and stable.

• 出版日期2017-10
• 单位四川大学