Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application. Part I: Design and simulation

作者：Yoshida Kazushi^*; Tanaka Shuji; Hagihara Yosuke; Tomonari Shigeaki; Esashi Masayoshi

来源：Sensors and Actuators A: Physical , 2010, 157(2): 299-306.

DOI：10.1016/j.sna.2009.11.029

• Microvalve
• Electrostatic actuator
• Fuel cell

This paper describes the design and simulation of an electrostatic microvalve which controls fuel in a portable direct methanol fuel cell (DMFC) system. The microvalve adopted a novel pressure balance mechanism to achieve normally closed operation against pressurized fuel. We established a theoretical model and method to simulate the performance of the microvalve, and designed the microvalve which controls methanol with a supply pressure of 30 kPa at a driving voltage of 36 V. This specification matches a 5 W class DMFC underdevelopment.

• 出版日期2010-2