Nonlinear modeling and analysis of electrically actuated viscoelastic microbeams based on the modified couple stress theory

作者：Attia M A^*; Mohamed S A

来源：Applied Mathematical Modelling, 2017, 41: 195-222.

DOI：10.1016/j.apm.2016.08.036

• Viscoelasticity
• MEMS
• Microbeams
• Modified couple stress theory
• Generalized integral/differential quadrature method

A nonclassical nonlinear continuum model of electrically actuated viscoelastic microbeams is presented based on the modified couple stress theory to consider the microstructure effect in the framework of viscoelasticity. The nonlinear integral-differential governing equation and related boundary conditions of are derived based on the extended Hamilton's principle and Euler-Bernoulli hypothesis for viscoelastic microbeams with clamped-free, clamped-clamped, simply-supported boundary conditions. The proposed model accounts for system nonlinearities including the axial residual stress, geometric nonlinearity due to midplane stretching, electrical forcing with fringing effect. The behavior of the microbeam is simulated using generalized Maxwell viscoelastic model. A new generalized differential/integral quadrature method is developed to solve the resulting governing equation. The developed model is verified against elastic behavior and a favorable agreement is obtained. Efficiency of the developed model is demonstrated by analyzing the quasistatic pull-in phenomena of electrically actuated viscoelastic microbeams with different boundaries at various material length scale parameters and axial residual stresses in the framework of linear viscoelasticity.

• 出版日期2017-1