Microstructure and electrical conductivity of epitaxial SrRuO3 thin films prepared on (001), (110) and (111) SrTiO3 substrates by laser ablation

作者：Ito Akihiko^*; Masumoto Hiroshi; Goto Takashi

来源：Materials Transactions, 2007, 48(2): 227-233.

DOI：10.2320/matertrans.48.227

• laser ablation
• strontium ruthenate
• thin films
• epitaxial growth
• conductive oxide
• microstructure
• electrical conductivity

Epitaxial SrRuO3 (SRO) thin films were prepared on SrTiO3 (STO) single-crystal substrates by laser ablation. and then microstructures and anisotropy of electrical conductivity were investigated. (001). (110) and (I I I) oriented SRO thin films were grown epitaxially on (001 (110) and (I 11) STO substrates at oxygen pressure of 13 Pa and substrate temperature of 973 K, respectively. Epitaxial (001) and (I 11) SRO thin films showed flat and smooth surface with a terrace and step structure whereas (I 10) SRO thin film had a faceted island-like structure. The in-plain orientation relationships of [100]-SRO // [100] STO in (001) SRO/(001) STO thin films, [001] SRO // [001] STO in (110) SRO/(I 10) STO thin films and [(1) over bar(1) over bar2] SRO // [(1) over bar(1) over bar2] STO in (I 11) SRO/(] 11) STO thin films were identified. Epitaxial (001) SRO thin films exhibited the highest electrical conductivity of 2.4 x 10(5) S(.)m(-1) among the (001) (110) and (I 11) SRO thin films.

• 出版日期2007-2