Molecular Lithography through DNA-Mediated Etching and Masking of SiO2

作者:Surwade, Sumedh P.; Zhao, Shichao; Liu, Haitao*
来源:Journal of the American Chemical Society, 2011, 133(31): 11868-11871.
DOI:10.1021/ja2038886

摘要

We demonstrate a new approach to pattern transfer for bottom-up nanofabrication. We show that DNA promotes/inhibits the etching of SiO2 at the single-molecule level, resulting in negative/positive tone pattern transfers from DNA to the SiO2 substrate.