Advances in diamond nanofabrication for ultrasensitive devices

作者：Castelletto Stefania; Rosa Lorenzo; Blackledge Jonathan; Al Abri Mohammed Zaher; Boretti Albert

来源：Microsystems & Nanoengineering, 2017, 3(1): UNSP 17061.

DOI：10.1038/micronano.2017.61

<jats:title>Abstract</jats:title><jats:p>This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano- and micro-mechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies.</jats:p>

• 出版日期2017-10-23