Determination of the Vibrational Excitation Cross-section for the F-2 Molecule in a Plasma Discharge Simulation

作者：Tuan Do Anh^*; Jeon Byung Hoon

来源：Journal of the Korean Physical Society, 2011, 58(4): 765-770.

DOI：10.3938/jkps.58.765

• Electron collision cross-section
• Fluorine
• Electron swarm method
• Vibrational excitation cross-section
• Electron drift velocity
• Boltzmann equation analysis
• Plasma discharge simulation

The electron collision cross-section for a fluorine molecular gas, which is necessary for modeling electron diffusion in a plasma reactor, has been determined included. This cross-section includes the vibrational excitation cross-section for F-2 molecule. We have calculated the electron drift velocities in two F-2-He mixtures (with 0.2% and 1% fluorine) and in pure F-2 by using the determined cross-sections and a two-term approximation of the Boltzmann equation for the energies. The results agree well with available experimental data for the electron drift velocity over a wide range of E/N (ratio of the electric field, E, to the neutral number density N). The present cross-sections may be important for quantitatively modeling plasma discharges for processing procedures with materials containing fluorine molecules.

• 出版日期2011-4