科研之友
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摘要
Model copy technology is an ideal approach for diamond patterning. However, incomplete filling were discovered in some of the diamond microstructures which were produced by model copy method. The effect of structural aspect ratio on the filling was investigated. The growth form of CVD diamond in the micro mould was analyzed. Results show that the nonuniformity of gas velocity distribution in the mould is the main course of incomplete filling, and an aspect ratio larger than 0.5 is necessary to achieve a complete filling.
- 出版日期2012
- 单位南京航空航天大学
