Magnetic-Particle-Composite-Medium-Filled Stacked-Spiral Inductors for Radio-Frequency CMOS Applications

作者：Zhan Jing^*; Cai Hua-Lin; Chen Xiao; Wang Xin; Fang Qiang; Yang Yi; Ren Tian-Ling; Liu Li-Tian; Li Xin-Xin; Wang Albert; Yang Chen

来源：Chinese Physics Letters, 2013, 30(12): 128401.

DOI：10.1088/0256-307X/30/12/128401

• RF INDUCTORS
• MICROSTRUCTURE
• CORE

Magnetic-particle-composite-medium-filled stacked-spiral inductors for rf complementary metal oxide semiconductor (CMOS) applications in GHz are demonstrated. The new inductor features a nearly closed magnetic circuit loop, an optimized high-permeability and low-loss sub-1 mu m magnetic particles' composite core, and a developed 0.18-mu m CMOS-compatible device fabrication process. An equivalent circuit model with structural amplifying factors is proposed and modeled. The prototype of the 6-level stacked inductor with Co-2 Z magnetic-particles- composite-medium filling increases the inductance L by 50%, and quality factor Q by 37% at frequencies as high as 1 GHz, with high inductance density as 825 nH/mm(2) and a reduced size area by 80% compared to the planar spiral inductor.

• 出版日期2013-12
• 单位清华大学; 中国科学院上海微系统与信息技术研究所