A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

作者：Battini Francesco; Volpi Emilio^*; Marchetti Eleonora; Cecchini Tommaso; Sechi Francesco; Fanucci Luca; Hofmann Ulrich

来源：Microelectronics Journal, 2010, 41(11): 778-788.

DOI：10.1016/j.mejo.2010.07.007

• Microelectromechanical systems (MEMS)
• MOEMS
• Micromirror
• Testing
• Low-cost characterization
• Fast-developing

Testing and characterization of micro-electro-mechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test MEMS and MOEMS especially to examine their motions, deflections, and resonance frequencies. This paper presents a fast-developing and low-cost environment for MEMS and MOEMS testing and characterization. The environment is based on a flexible mixed-signal platform named Intelligent Sensor InterFace (ISIF). As a case study we consider the characterization of a double axis scanning micromirror. The testing environment has been validated by comparing measurement results with results obtained by the finite element method simulations performed with Comsol Multiphysics. Finally, these results have been exploited to create an electrical equivalent model of the micromirror.

• 出版日期2010-11