A diameter 300 mu m Bragg reflector for acoustic isolation of resonant micro-actuators

作者：Rogers G^*

来源：Journal of Micromechanics and Microengineering, 2011, 21(4): 042001.

DOI：10.1088/0960-1317/21/4/042001

This study provides a means of isolating the acoustic energy of a resonant micro-actuator from that of its surroundings, improving actuation efficiency and mitigating spurious vibrations. A commercial finite-element package is used to model a diameter 300 mu m stainless-steel-nylon composite waveguide micro Bragg reflector, from which the optimum isolation parameters are inferred. A prototype is constructed and tested, producing acoustic isolation for a range of frequencies with a bandwidth of 380 kHz at a centre frequency of 520 kHz. Excellent quantitative agreement is found between the numerical and experimental findings, validating this new method of designing Bragg reflectors and demonstrating the potential to use these intermediary devices for micro-actuator isolation. This micro Bragg reflector will allow micro-actuators to be integrated with other systems, such as minimally invasive microsurgical equipment.

• 出版日期2011-4