A WAFER-LEVEL PRESSURE CALIBRATION METHOD FOR INTEGRATED ACCELEROMETER AND PRESSURE SENSOR IN TPMS APPLICATION

作者：Zhang Yangxi; Meng Fanrui; Liu Guandong; Gao Chengchen^*; Hao Yilong

来源：18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015-06-21 to 2015-06-25.

• Wafer Level
• Pressure Calibration
• Tire Pressure
• Monitoring System
• Piezoresistive Accelerometer

The tire pressure monitoring system (TPMS) normally contains an accelerometer. For piezoresistive accelerometers, low cost wafer-level full-range calibration is still a challenge. A novel wafer-lever pressure calibration method for accelerometer is reported in this paper. This method can be applied on a beam-block-membrane structure accelerometer which is sensitive to both acceleration and pressure. By measuring accelerometer's full-range response in a static pressure test step, the method can significantly reduce testing cost and workload in TPMS sensor production. Integrated pressure sensor can also be tested in this pressure test step. Simulation results show the feasibility to calculate the accelerometer's response from pressure test results. An integrated sensor (100g+500kPa measure range) for TPMS application was fabricated and measured through pressure test.

• 出版日期2015
• 单位北京大学