An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

作者：Yang Yi; Tian He; Wang Yu Feng; Shu Yi; Zhou Chang Jian; Sun Hui; Zhang Cang Hai; Chen Hao; Ren Tian Ling^*

来源：Sensors (Switzerland), 2013, 13(8): 9624-9634.

DOI：10.3390/s130809624

• piezoelectric
• ultrasonic transducer
• Si-SOI bonding
• IC integration compatibility
• 3-D medical imaging

A approximate to 1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 x 6 pMUT arrays can all work at the desired frequency (approximate to 1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is approximate to 20 m, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.

• 出版日期2013-8
• 单位清华大学