Analysis of Self-Heating Effects on vertical FET according to Shallow Trench Isolation

作者：Myeong Ilho; Son Dokyun; Kim Hyunsuk; Kang Myounggon; Shin Hyungcheol^*

来源：Solid-State Electronics, 2017, 137: 123-127.

DOI：10.1016/j.sse.2017.07.013

• Self Heating Effect (SHE)
• Thermal resistance (R-th)
• Plate-shaped vertical field effect transistor (VFET)
• Heat flux
• Delta T-max

In this paper, Self-Heating Effect (SHE) according to depth of STI was analyzed and STI thickness optimization was performed in the plate-shaped vertical field effect transistor (VFET). In case of a VFET, the path of leakage current (I-off) is different from that of a lateral FET (LFET). As a result, Ioff of VFET is not influenced by STI depth. For this reason, the STI depth of the VFET is not needed as much as the depth needed to reduce Ioff in the LFET. As a result, if the STI depth of the VFET is reduced from 100 nm to 20 nm, which is the drain region depth doped with Arsenic, thermal resistance (R-th) is expected to be reduced by 32.19% and on current (I-on) is expected to be increased by 1.54% without affecting the Ioff as compared with STI depth of 100 nm in VFET.

• 出版日期2017-11