Nanofin based filaments for sensor applications

作者：Kallis Klaus T^*; Keller Lars O; Kuechenmeister Christian; Horstmann John T; Knoch J; Fiedler Horst L

来源：Microelectronic Engineering, 2011, 88(8): 2290-2293.

DOI：10.1016/j.mee.2011.02.088

• Nanofin
• Filament
• Nanowire
• Nanosensor
• Sensor
• Nanocircuitry
• NEMS
• Nanolithography

The field of nanoelectromechanical systems (NEMS) gains in importance and interest. The combination of micromechanics and nanotechnology enables the development of innovative nanosystems. In addition to the potential high integration level these systems feature superior properties especially concerning their power consumption and sensitivity. Systems with a low mass and a high surface-area-to-volume-ratio (SAVR) allow extreme high responsiveness if the active principle of a sensor is depended on its surface. To enlarge the field of possible applications - for example regeneration of a reactive sensor surface by annealing - a heated sensor is desirable. Therefore nanofin based filaments which can be used in several nanosensor applications are presented in this work. One possible application of these filaments is shown by using the example of a mercury sensor.

• 出版日期2011-8